5/4/2010	9:50:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/4/2010	9:50:35 AM	Recipe started at 9:50 AM
5/4/2010	9:50:35 AM	H2 valve closed
5/4/2010	9:50:35 AM	BCl3 valve closed
5/4/2010	9:50:35 AM	PH3 valve closed
5/4/2010	9:50:35 AM	SiCl4 pre valve closed
5/4/2010	9:50:35 AM	SiCl4 post valve closed
5/4/2010	9:50:35 AM	Main Vac valve closed
5/4/2010	9:50:35 AM	Bypass valve closed
5/4/2010	9:50:35 AM	Bubbler valve closed
5/4/2010	9:50:35 AM	Helium valve opened
5/4/2010	9:50:35 AM	Helium MFC set to  500.000000
5/4/2010	9:50:35 AM	H2 MFC set to  0.000000
5/4/2010	9:50:35 AM	BCl3 MFC set to  0.000000
5/4/2010	9:50:35 AM	SiCl4 MFC set to  0.000000
5/4/2010	9:50:35 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	9:50:35 AM	Tube furnace set to 0
5/4/2010	9:51:56 AM	Helium valve closed
5/4/2010	9:51:56 AM	H2 valve closed
5/4/2010	9:51:56 AM	BCl3 valve closed
5/4/2010	9:51:56 AM	PH3 valve closed
5/4/2010	9:51:56 AM	SiCl4 pre valve closed
5/4/2010	9:51:56 AM	SiCl4 post valve closed
5/4/2010	9:51:56 AM	Main Vac valve closed
5/4/2010	9:51:56 AM	Bypass valve closed
5/4/2010	9:51:56 AM	Bubbler valve closed
5/4/2010	9:51:56 AM	Helium MFC set to  0.000000
5/4/2010	9:51:56 AM	H2 MFC set to  0.000000
5/4/2010	9:51:56 AM	BCl3 MFC set to  0.000000
5/4/2010	9:51:56 AM	SiCl4 MFC set to  0.000000
5/4/2010	9:51:56 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	9:51:56 AM	Tube furnace set to 0
5/4/2010	9:51:56 AM	Run finished at 9:51 AM
5/4/2010	9:51:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/4/2010	9:58:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2010	9:58:40 AM	Recipe started at 9:58 AM
5/4/2010	9:58:40 AM	Helium valve closed
5/4/2010	9:58:40 AM	H2 valve closed
5/4/2010	9:58:40 AM	BCl3 valve closed
5/4/2010	9:58:40 AM	PH3 valve closed
5/4/2010	9:58:40 AM	SiCl4 pre valve closed
5/4/2010	9:58:40 AM	SiCl4 post valve closed
5/4/2010	9:58:40 AM	Main Vac valve closed
5/4/2010	9:58:40 AM	Bubbler valve closed
5/4/2010	9:58:40 AM	Bypass valve opened
5/4/2010	9:58:40 AM	Helium MFC set to  0.000000
5/4/2010	9:58:40 AM	H2 MFC set to  0.000000
5/4/2010	9:58:40 AM	BCl3 MFC set to  0.000000
5/4/2010	9:58:40 AM	SiCl4 MFC set to  0.000000
5/4/2010	9:58:40 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	9:58:40 AM	Tube furnace set to 0
5/4/2010	9:59:23 AM	Helium valve closed
5/4/2010	9:59:23 AM	H2 valve closed
5/4/2010	9:59:23 AM	BCl3 valve closed
5/4/2010	9:59:23 AM	PH3 valve closed
5/4/2010	9:59:23 AM	SiCl4 pre valve closed
5/4/2010	9:59:23 AM	SiCl4 post valve closed
5/4/2010	9:59:23 AM	Bubbler valve closed
5/4/2010	9:59:23 AM	Main Vac valve opened
5/4/2010	9:59:23 AM	Bypass valve opened
5/4/2010	9:59:23 AM	Helium MFC set to  0.000000
5/4/2010	9:59:23 AM	H2 MFC set to  0.000000
5/4/2010	9:59:23 AM	BCl3 MFC set to  0.000000
5/4/2010	9:59:23 AM	SiCl4 MFC set to  0.000000
5/4/2010	9:59:23 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	9:59:23 AM	Tube furnace set to 0
5/4/2010	9:59:23 AM	Run finished at 9:59 AM
5/4/2010	9:59:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2010	9:59:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/4/2010	9:59:49 AM	Recipe started at 9:59 AM
5/4/2010	9:59:49 AM	H2 valve closed
5/4/2010	9:59:49 AM	BCl3 valve closed
5/4/2010	9:59:49 AM	PH3 valve closed
5/4/2010	9:59:49 AM	SiCl4 pre valve closed
5/4/2010	9:59:49 AM	SiCl4 post valve closed
5/4/2010	9:59:49 AM	Main Vac valve closed
5/4/2010	9:59:49 AM	Bypass valve closed
5/4/2010	9:59:49 AM	Bubbler valve closed
5/4/2010	9:59:49 AM	Helium valve opened
5/4/2010	9:59:49 AM	Helium MFC set to  500.000000
5/4/2010	9:59:49 AM	H2 MFC set to  0.000000
5/4/2010	9:59:49 AM	BCl3 MFC set to  0.000000
5/4/2010	9:59:49 AM	SiCl4 MFC set to  0.000000
5/4/2010	9:59:49 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	9:59:49 AM	Tube furnace set to 0
5/4/2010	10:01:12 AM	Helium valve closed
5/4/2010	10:01:12 AM	H2 valve closed
5/4/2010	10:01:12 AM	BCl3 valve closed
5/4/2010	10:01:12 AM	PH3 valve closed
5/4/2010	10:01:12 AM	SiCl4 pre valve closed
5/4/2010	10:01:12 AM	SiCl4 post valve closed
5/4/2010	10:01:12 AM	Main Vac valve closed
5/4/2010	10:01:12 AM	Bypass valve closed
5/4/2010	10:01:12 AM	Bubbler valve closed
5/4/2010	10:01:12 AM	Helium MFC set to  0.000000
5/4/2010	10:01:12 AM	H2 MFC set to  0.000000
5/4/2010	10:01:12 AM	BCl3 MFC set to  0.000000
5/4/2010	10:01:12 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:01:12 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:01:12 AM	Tube furnace set to 0
5/4/2010	10:01:27 AM	Helium valve closed
5/4/2010	10:01:27 AM	H2 valve closed
5/4/2010	10:01:27 AM	BCl3 valve closed
5/4/2010	10:01:27 AM	PH3 valve closed
5/4/2010	10:01:27 AM	SiCl4 pre valve closed
5/4/2010	10:01:27 AM	SiCl4 post valve closed
5/4/2010	10:01:27 AM	Main Vac valve closed
5/4/2010	10:01:27 AM	Bubbler valve closed
5/4/2010	10:01:27 AM	Bypass valve opened
5/4/2010	10:01:27 AM	Helium MFC set to  0.000000
5/4/2010	10:01:27 AM	H2 MFC set to  0.000000
5/4/2010	10:01:27 AM	BCl3 MFC set to  0.000000
5/4/2010	10:01:27 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:01:27 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:01:27 AM	Tube furnace set to 0
5/4/2010	10:01:58 AM	Helium valve closed
5/4/2010	10:01:58 AM	H2 valve closed
5/4/2010	10:01:58 AM	BCl3 valve closed
5/4/2010	10:01:58 AM	PH3 valve closed
5/4/2010	10:01:58 AM	SiCl4 pre valve closed
5/4/2010	10:01:58 AM	SiCl4 post valve closed
5/4/2010	10:01:58 AM	Bubbler valve closed
5/4/2010	10:01:58 AM	Main Vac valve opened
5/4/2010	10:01:58 AM	Bypass valve opened
5/4/2010	10:01:58 AM	Helium MFC set to  0.000000
5/4/2010	10:01:58 AM	H2 MFC set to  0.000000
5/4/2010	10:01:58 AM	BCl3 MFC set to  0.000000
5/4/2010	10:01:58 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:01:58 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:01:58 AM	Tube furnace set to 0
5/4/2010	10:06:58 AM	H2 valve closed
5/4/2010	10:06:58 AM	BCl3 valve closed
5/4/2010	10:06:58 AM	PH3 valve closed
5/4/2010	10:06:58 AM	SiCl4 pre valve closed
5/4/2010	10:06:58 AM	SiCl4 post valve closed
5/4/2010	10:06:58 AM	Main Vac valve closed
5/4/2010	10:06:58 AM	Bypass valve closed
5/4/2010	10:06:58 AM	Bubbler valve closed
5/4/2010	10:06:58 AM	Helium valve opened
5/4/2010	10:06:58 AM	Helium MFC set to  500.000000
5/4/2010	10:06:58 AM	H2 MFC set to  0.000000
5/4/2010	10:06:58 AM	BCl3 MFC set to  0.000000
5/4/2010	10:06:58 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:06:58 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:06:58 AM	Tube furnace set to 0
5/4/2010	10:08:21 AM	Helium valve closed
5/4/2010	10:08:21 AM	H2 valve closed
5/4/2010	10:08:21 AM	BCl3 valve closed
5/4/2010	10:08:21 AM	PH3 valve closed
5/4/2010	10:08:21 AM	SiCl4 pre valve closed
5/4/2010	10:08:21 AM	SiCl4 post valve closed
5/4/2010	10:08:21 AM	Main Vac valve closed
5/4/2010	10:08:21 AM	Bypass valve closed
5/4/2010	10:08:21 AM	Bubbler valve closed
5/4/2010	10:08:21 AM	Helium MFC set to  0.000000
5/4/2010	10:08:21 AM	H2 MFC set to  0.000000
5/4/2010	10:08:21 AM	BCl3 MFC set to  0.000000
5/4/2010	10:08:21 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:08:21 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:08:22 AM	Tube furnace set to 0
5/4/2010	10:08:37 AM	Helium valve closed
5/4/2010	10:08:37 AM	H2 valve closed
5/4/2010	10:08:37 AM	BCl3 valve closed
5/4/2010	10:08:37 AM	PH3 valve closed
5/4/2010	10:08:37 AM	SiCl4 pre valve closed
5/4/2010	10:08:37 AM	SiCl4 post valve closed
5/4/2010	10:08:37 AM	Main Vac valve closed
5/4/2010	10:08:37 AM	Bubbler valve closed
5/4/2010	10:08:37 AM	Bypass valve opened
5/4/2010	10:08:37 AM	Helium MFC set to  0.000000
5/4/2010	10:08:37 AM	H2 MFC set to  0.000000
5/4/2010	10:08:37 AM	BCl3 MFC set to  0.000000
5/4/2010	10:08:37 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:08:37 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:08:37 AM	Tube furnace set to 0
5/4/2010	10:09:07 AM	Helium valve closed
5/4/2010	10:09:07 AM	H2 valve closed
5/4/2010	10:09:07 AM	BCl3 valve closed
5/4/2010	10:09:07 AM	PH3 valve closed
5/4/2010	10:09:07 AM	SiCl4 pre valve closed
5/4/2010	10:09:07 AM	SiCl4 post valve closed
5/4/2010	10:09:07 AM	Bubbler valve closed
5/4/2010	10:09:07 AM	Main Vac valve opened
5/4/2010	10:09:07 AM	Bypass valve opened
5/4/2010	10:09:07 AM	Helium MFC set to  0.000000
5/4/2010	10:09:07 AM	H2 MFC set to  0.000000
5/4/2010	10:09:07 AM	BCl3 MFC set to  0.000000
5/4/2010	10:09:07 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:09:07 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:09:07 AM	Tube furnace set to 0
5/4/2010	10:10:22 AM	Run aborted at 10:10 AM
5/4/2010	10:10:22 AM	Helium valve closed
5/4/2010	10:10:22 AM	H2 valve closed
5/4/2010	10:10:22 AM	BCl3 valve closed
5/4/2010	10:10:22 AM	PH3 valve closed
5/4/2010	10:10:22 AM	SiCl4 pre valve closed
5/4/2010	10:10:22 AM	SiCl4 post valve closed
5/4/2010	10:10:22 AM	Bypass valve closed
5/4/2010	10:10:22 AM	Main Vac valve closed
5/4/2010	10:10:22 AM	Bubbler valve closed
5/4/2010	10:10:22 AM	Helium MFC set to  0.000000
5/4/2010	10:10:22 AM	H2 MFC set to  0.000000
5/4/2010	10:10:22 AM	BCl3 MFC set to  0.000000
5/4/2010	10:10:22 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:10:22 AM	Tube furnace set to 0
5/4/2010	10:10:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/4/2010	10:10:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2010	10:10:26 AM	Recipe started at 10:10 AM
5/4/2010	10:10:26 AM	Helium valve closed
5/4/2010	10:10:26 AM	H2 valve closed
5/4/2010	10:10:26 AM	BCl3 valve closed
5/4/2010	10:10:26 AM	PH3 valve closed
5/4/2010	10:10:26 AM	SiCl4 pre valve closed
5/4/2010	10:10:26 AM	SiCl4 post valve closed
5/4/2010	10:10:26 AM	Main Vac valve closed
5/4/2010	10:10:26 AM	Bubbler valve closed
5/4/2010	10:10:26 AM	Bypass valve opened
5/4/2010	10:10:26 AM	Helium MFC set to  0.000000
5/4/2010	10:10:26 AM	H2 MFC set to  0.000000
5/4/2010	10:10:26 AM	BCl3 MFC set to  0.000000
5/4/2010	10:10:26 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:10:26 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:10:26 AM	Tube furnace set to 0
5/4/2010	10:10:26 AM	Helium valve closed
5/4/2010	10:10:26 AM	H2 valve closed
5/4/2010	10:10:26 AM	BCl3 valve closed
5/4/2010	10:10:26 AM	PH3 valve closed
5/4/2010	10:10:26 AM	SiCl4 pre valve closed
5/4/2010	10:10:26 AM	SiCl4 post valve closed
5/4/2010	10:10:26 AM	Bubbler valve closed
5/4/2010	10:10:26 AM	Main Vac valve opened
5/4/2010	10:10:26 AM	Bypass valve opened
5/4/2010	10:10:26 AM	Helium MFC set to  0.000000
5/4/2010	10:10:26 AM	H2 MFC set to  0.000000
5/4/2010	10:10:26 AM	BCl3 MFC set to  0.000000
5/4/2010	10:10:26 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:10:26 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:10:26 AM	Tube furnace set to 0
5/4/2010	10:10:27 AM	Run finished at 10:10 AM
5/4/2010	10:10:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2010	10:13:19 AM	Recipe started at 10:13 AM
5/4/2010	10:13:19 AM	BCl3 valve closed
5/4/2010	10:13:19 AM	PH3 valve closed
5/4/2010	10:13:19 AM	SiCl4 pre valve closed
5/4/2010	10:13:19 AM	SiCl4 post valve closed
5/4/2010	10:13:19 AM	Main Vac valve closed
5/4/2010	10:13:19 AM	Bypass valve closed
5/4/2010	10:13:19 AM	Bubbler valve closed
5/4/2010	10:13:19 AM	Helium valve opened
5/4/2010	10:13:19 AM	H2 valve opened
5/4/2010	10:13:19 AM	Helium MFC set to  475.000000
5/4/2010	10:13:19 AM	H2 MFC set to  25.000000
5/4/2010	10:13:19 AM	BCl3 MFC set to  0.000000
5/4/2010	10:13:19 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:13:19 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:13:19 AM	Tube furnace set to 0
5/4/2010	10:14:43 AM	BCl3 valve closed
5/4/2010	10:14:43 AM	PH3 valve closed
5/4/2010	10:14:43 AM	SiCl4 pre valve closed
5/4/2010	10:14:43 AM	SiCl4 post valve closed
5/4/2010	10:14:43 AM	Main Vac valve closed
5/4/2010	10:14:43 AM	Bypass valve closed
5/4/2010	10:14:43 AM	Helium valve opened
5/4/2010	10:14:43 AM	H2 valve opened
5/4/2010	10:14:43 AM	Bubbler valve opened
5/4/2010	10:14:43 AM	Helium MFC set to  475.000000
5/4/2010	10:14:43 AM	H2 MFC set to  25.000000
5/4/2010	10:14:43 AM	BCl3 MFC set to  0.000000
5/4/2010	10:14:43 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:14:43 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:14:43 AM	Tube furnace set to 200
5/4/2010	10:44:43 AM	H2 valve closed
5/4/2010	10:44:43 AM	BCl3 valve closed
5/4/2010	10:44:43 AM	PH3 valve closed
5/4/2010	10:44:43 AM	SiCl4 pre valve closed
5/4/2010	10:44:43 AM	SiCl4 post valve closed
5/4/2010	10:44:43 AM	Main Vac valve closed
5/4/2010	10:44:43 AM	Bypass valve closed
5/4/2010	10:44:43 AM	Helium valve opened
5/4/2010	10:44:43 AM	Bubbler valve opened
5/4/2010	10:44:43 AM	Helium MFC set to  500.000000
5/4/2010	10:44:43 AM	H2 MFC set to  0.000000
5/4/2010	10:44:43 AM	BCl3 MFC set to  0.000000
5/4/2010	10:44:43 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:44:43 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:44:44 AM	Tube furnace set to 0
5/4/2010	10:54:44 AM	Helium valve closed
5/4/2010	10:54:44 AM	H2 valve closed
5/4/2010	10:54:44 AM	BCl3 valve closed
5/4/2010	10:54:44 AM	PH3 valve closed
5/4/2010	10:54:44 AM	SiCl4 pre valve closed
5/4/2010	10:54:44 AM	SiCl4 post valve closed
5/4/2010	10:54:44 AM	Main Vac valve closed
5/4/2010	10:54:44 AM	Bypass valve closed
5/4/2010	10:54:44 AM	Bubbler valve closed
5/4/2010	10:54:44 AM	Helium MFC set to  0.000000
5/4/2010	10:54:44 AM	H2 MFC set to  0.000000
5/4/2010	10:54:44 AM	BCl3 MFC set to  0.000000
5/4/2010	10:54:44 AM	SiCl4 MFC set to  0.000000
5/4/2010	10:54:44 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	10:54:44 AM	Tube furnace set to 0
5/4/2010	10:54:44 AM	Run finished at 10:54 AM
5/4/2010	11:26:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/4/2010	11:26:19 AM	Recipe started at 11:26 AM
5/4/2010	11:26:19 AM	H2 valve closed
5/4/2010	11:26:19 AM	BCl3 valve closed
5/4/2010	11:26:19 AM	PH3 valve closed
5/4/2010	11:26:19 AM	SiCl4 pre valve closed
5/4/2010	11:26:19 AM	SiCl4 post valve closed
5/4/2010	11:26:19 AM	Main Vac valve closed
5/4/2010	11:26:19 AM	Bypass valve closed
5/4/2010	11:26:19 AM	Bubbler valve closed
5/4/2010	11:26:19 AM	Helium valve opened
5/4/2010	11:26:19 AM	Helium MFC set to  500.000000
5/4/2010	11:26:19 AM	H2 MFC set to  0.000000
5/4/2010	11:26:19 AM	BCl3 MFC set to  0.000000
5/4/2010	11:26:19 AM	SiCl4 MFC set to  0.000000
5/4/2010	11:26:19 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	11:26:19 AM	Tube furnace set to 0
5/4/2010	11:26:21 AM	Helium valve closed
5/4/2010	11:26:21 AM	H2 valve closed
5/4/2010	11:26:21 AM	BCl3 valve closed
5/4/2010	11:26:21 AM	PH3 valve closed
5/4/2010	11:26:21 AM	SiCl4 pre valve closed
5/4/2010	11:26:21 AM	SiCl4 post valve closed
5/4/2010	11:26:21 AM	Main Vac valve closed
5/4/2010	11:26:21 AM	Bypass valve closed
5/4/2010	11:26:22 AM	Bubbler valve closed
5/4/2010	11:26:22 AM	Helium MFC set to  0.000000
5/4/2010	11:26:22 AM	H2 MFC set to  0.000000
5/4/2010	11:26:22 AM	BCl3 MFC set to  0.000000
5/4/2010	11:26:22 AM	SiCl4 MFC set to  0.000000
5/4/2010	11:26:22 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	11:26:22 AM	Tube furnace set to 0
5/4/2010	11:26:22 AM	Run finished at 11:26 AM
5/4/2010	11:26:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/4/2010	11:26:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2010	11:26:25 AM	Recipe started at 11:26 AM
5/4/2010	11:26:25 AM	Helium valve closed
5/4/2010	11:26:25 AM	H2 valve closed
5/4/2010	11:26:25 AM	BCl3 valve closed
5/4/2010	11:26:25 AM	PH3 valve closed
5/4/2010	11:26:25 AM	SiCl4 pre valve closed
5/4/2010	11:26:25 AM	SiCl4 post valve closed
5/4/2010	11:26:25 AM	Main Vac valve closed
5/4/2010	11:26:25 AM	Bubbler valve closed
5/4/2010	11:26:25 AM	Bypass valve opened
5/4/2010	11:26:25 AM	Helium MFC set to  0.000000
5/4/2010	11:26:25 AM	H2 MFC set to  0.000000
5/4/2010	11:26:25 AM	BCl3 MFC set to  0.000000
5/4/2010	11:26:25 AM	SiCl4 MFC set to  0.000000
5/4/2010	11:26:25 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	11:26:25 AM	Tube furnace set to 0
5/4/2010	11:26:32 AM	Run aborted at 11:26 AM
5/4/2010	11:26:32 AM	Helium valve closed
5/4/2010	11:26:32 AM	H2 valve closed
5/4/2010	11:26:32 AM	BCl3 valve closed
5/4/2010	11:26:32 AM	PH3 valve closed
5/4/2010	11:26:32 AM	SiCl4 pre valve closed
5/4/2010	11:26:32 AM	SiCl4 post valve closed
5/4/2010	11:26:32 AM	Bypass valve closed
5/4/2010	11:26:32 AM	Main Vac valve closed
5/4/2010	11:26:32 AM	Bubbler valve closed
5/4/2010	11:26:32 AM	Helium MFC set to  0.000000
5/4/2010	11:26:32 AM	H2 MFC set to  0.000000
5/4/2010	11:26:32 AM	BCl3 MFC set to  0.000000
5/4/2010	11:26:32 AM	SiCl4 MFC set to  0.000000
5/4/2010	11:26:32 AM	Tube furnace set to 0
5/4/2010	11:26:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2010	11:26:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/4/2010	11:26:34 AM	Recipe started at 11:26 AM
5/4/2010	11:26:34 AM	H2 valve closed
5/4/2010	11:26:34 AM	BCl3 valve closed
5/4/2010	11:26:34 AM	PH3 valve closed
5/4/2010	11:26:34 AM	SiCl4 pre valve closed
5/4/2010	11:26:34 AM	SiCl4 post valve closed
5/4/2010	11:26:34 AM	Main Vac valve closed
5/4/2010	11:26:34 AM	Bypass valve closed
5/4/2010	11:26:34 AM	Bubbler valve closed
5/4/2010	11:26:34 AM	Helium valve opened
5/4/2010	11:26:34 AM	Helium MFC set to  500.000000
5/4/2010	11:26:34 AM	H2 MFC set to  0.000000
5/4/2010	11:26:34 AM	BCl3 MFC set to  0.000000
5/4/2010	11:26:34 AM	SiCl4 MFC set to  0.000000
5/4/2010	11:26:34 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	11:26:34 AM	Tube furnace set to 0
5/4/2010	11:26:58 AM	Helium valve closed
5/4/2010	11:26:58 AM	H2 valve closed
5/4/2010	11:26:58 AM	BCl3 valve closed
5/4/2010	11:26:58 AM	PH3 valve closed
5/4/2010	11:26:58 AM	SiCl4 pre valve closed
5/4/2010	11:26:58 AM	SiCl4 post valve closed
5/4/2010	11:26:58 AM	Main Vac valve closed
5/4/2010	11:26:58 AM	Bypass valve closed
5/4/2010	11:26:58 AM	Bubbler valve closed
5/4/2010	11:26:58 AM	Helium MFC set to  0.000000
5/4/2010	11:26:58 AM	H2 MFC set to  0.000000
5/4/2010	11:26:58 AM	BCl3 MFC set to  0.000000
5/4/2010	11:26:58 AM	SiCl4 MFC set to  0.000000
5/4/2010	11:26:58 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	11:26:58 AM	Tube furnace set to 0
5/4/2010	11:26:58 AM	Run finished at 11:26 AM
5/4/2010	11:26:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/4/2010	11:29:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/4/2010	11:29:55 AM	Recipe started at 11:29 AM
5/4/2010	11:29:55 AM	Helium valve closed
5/4/2010	11:29:55 AM	H2 valve closed
5/4/2010	11:29:55 AM	BCl3 valve closed
5/4/2010	11:29:55 AM	PH3 valve closed
5/4/2010	11:29:55 AM	SiCl4 pre valve closed
5/4/2010	11:29:55 AM	SiCl4 post valve closed
5/4/2010	11:29:55 AM	Main Vac valve closed
5/4/2010	11:29:55 AM	Bubbler valve closed
5/4/2010	11:29:55 AM	Bypass valve opened
5/4/2010	11:29:55 AM	Helium MFC set to  0.000000
5/4/2010	11:29:55 AM	H2 MFC set to  0.000000
5/4/2010	11:29:55 AM	BCl3 MFC set to  0.000000
5/4/2010	11:29:55 AM	SiCl4 MFC set to  0.000000
5/4/2010	11:29:55 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	11:29:55 AM	Tube furnace set to 0
5/4/2010	11:30:39 AM	Helium valve closed
5/4/2010	11:30:39 AM	H2 valve closed
5/4/2010	11:30:39 AM	BCl3 valve closed
5/4/2010	11:30:39 AM	PH3 valve closed
5/4/2010	11:30:39 AM	SiCl4 pre valve closed
5/4/2010	11:30:39 AM	SiCl4 post valve closed
5/4/2010	11:30:39 AM	Bubbler valve closed
5/4/2010	11:30:39 AM	Main Vac valve opened
5/4/2010	11:30:39 AM	Bypass valve opened
5/4/2010	11:30:39 AM	Helium MFC set to  0.000000
5/4/2010	11:30:39 AM	H2 MFC set to  0.000000
5/4/2010	11:30:39 AM	BCl3 MFC set to  0.000000
5/4/2010	11:30:39 AM	SiCl4 MFC set to  0.000000
5/4/2010	11:30:39 AM	Bypass solenoid MFC set to  0.000000
5/4/2010	11:30:39 AM	Tube furnace set to 0
5/4/2010	11:30:39 AM	Run finished at 11:30 AM
5/4/2010	11:30:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
